DocumentCode
2349646
Title
Integration of gallium nitride and silicon: From devices to Diamond
Author
Piner, Edwin L.
Author_Institution
Texas State Univ., San Marcos, TX, USA
fYear
2011
fDate
3-6 Oct. 2011
Firstpage
1
Lastpage
18
Abstract
A collection of slides from the author´s conference presentation is given. The following topics are discussed: silicon as a substrate for GaN epitaxy; N-Polar GaN HEMT; and GaN/Diamond wafer process.
Keywords
diamond; epitaxial growth; gallium compounds; high electron mobility transistors; silicon; substrates; N-polar HEMT; diamond; gallium nitride epitaxy; silicon; substrate; wafer process; Diamond-like carbon; Epitaxial growth; Gallium nitride; Indium gallium arsenide; Silicon; Silicon carbide; Thermal conductivity;
fLanguage
English
Publisher
ieee
Conference_Titel
SOI Conference (SOI), 2011 IEEE International
Conference_Location
Tempe, AZ
ISSN
1078-621X
Print_ISBN
978-1-61284-761-0
Electronic_ISBN
1078-621X
Type
conf
DOI
10.1109/SOI.2011.6081705
Filename
6081705
Link To Document