DocumentCode :
2349699
Title :
Wideband RF-MEMS shunt switches with high reliability for microwave and millimeter wave applications
Author :
Onodera, K. ; Yi Zhang ; Maeda, Ryutaro
Author_Institution :
Nat. Inst. of Adv. Ind. Sci. & Technol.
fYear :
2005
fDate :
6-7 April 2005
Firstpage :
40
Lastpage :
40
Abstract :
Summary form only give, as follows. An ultra wideband RF-MEMS shunt switch with a PZT/HfO2 stacked insulator has been developed for microwave and millimeter wave applications. The both of the conjunctive dielectric constant, 80, of PZT(r=800)/HfO2(r=20) stack layer and a match circuit contribute to high isolation of -30 dB at ultra wideband from 1 GHz to 50 GHz frequencies. The increase of the trap density in the HfO2 layer caused from carrier injection from the electrode of the switch into the insulator is smaller than that of silicon nitride (Si 3N4) under constant voltage stress resulting in the suppression of the stiction of the switch. The percolation and annealing model is analytically introduced to explain the lower trap density and higher stress-endurance characteristics of HfO2 than Si3N4 usually used as switch insulator. The projected lifetime of the witch with the stacked layer is more than 10 years. This is the best data ever reported
Keywords :
circuit reliability; microswitches; microwave switches; millimetre wave devices; ultra wideband technology; 1 to 50 GHz; annealing model; conjunctive dielectric constant; electrode; microwave applications; millimeter wave applications; percolation; silicon nitride; stacked insulator; ultra wideband RF-MEMS shunt switch; Dielectric constant; Dielectrics and electrical insulation; Electrodes; Frequency; Millimeter wave circuits; Radiofrequency microelectromechanical systems; Switches; Ultra wideband technology;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Wireless and Microwave Technology, 2005. WAMICON 2005. The 2005 IEEE Annual Conference
Conference_Location :
Clearwater Beach, FL
Print_ISBN :
0-7803-8861-5
Type :
conf
DOI :
10.1109/WAMIC.2005.1528377
Filename :
1528377
Link To Document :
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