Title :
The science and technology of micro-machines: development of an undergraduate course
Author :
Henning, Albert K. ; Levey, Christopher G.
Author_Institution :
Thayer Sch. of Eng., Dartmouth Coll., Hanover, NH, USA
Abstract :
The technological foundations of microelectronics provide the basis for the emerging science and technology of micro-machines. Most instruction in micro-machines has occurred at the graduate level, leaving a relative void in the undergraduate curriculum. With industrial and governmental support, we have incorporated hands-on fabrication and foundry-based device design into a comprehensive undergraduate course
Keywords :
educational courses; electronic engineering education; integrated circuit technology; micromachining; micromechanical devices; fabrication process; foundry-based device design; micromachine technology; undergraduate course; Chemical analysis; Design engineering; Educational institutions; Microelectronics; Physics; Rapid thermal processing; Scanning electron microscopy; Space technology; Thermal force; Thermal resistance;
Conference_Titel :
University/Government/Industry Microelectronics Symposium, 1995., Proceedings of the Eleventh Biennial
Conference_Location :
Austin, TX
Print_ISBN :
0-7803-2596-6
DOI :
10.1109/UGIM.1995.514151
