Title :
3G-4 Modes and Damping in cMUT Transducers for Acoustic Emission
Author :
Greve, D.W. ; Wu, W. ; Oppenheim, I.J.
Keywords :
Acoustic emission; Acoustic signal detection; Acoustic transducers; Damping; Electrodes; Piezoelectric transducers; Resonance; Resonant frequency; Springs; Vibrations;
Conference_Titel :
Ultrasonics Symposium, 2006. IEEE
Conference_Location :
Vancouver, BC, Canada
Print_ISBN :
1-4244-0201-8
Electronic_ISBN :
1051-0117
DOI :
10.1109/ULTSYM.2006.180