Title :
6H-5 Design, Elaboration and Characterization of Coupled Resonator Filters for WCDMA Applications
Author :
Volatier, A. ; Defay, E. ; Hari, A.N. ; Carpentier, J.F. ; Ancey, P. ; Dubus, B.
Author_Institution :
STMicroelectronics, FTM Crolles
Abstract :
This work presents the design, manufacturing and characterization of bulk acoustic wave coupled resonator filter (BAW CRF) for W-CDMA applications. Aluminum nitride resonators with molybdenum electrodes are acoustically coupled through a W/SiO2 multi-layered stack and insulated by a fully dielectric SiN/SiOC Bragg mirror. This configuration provides galvanic isolation between input and output making CRF suitable for single-to-balanced conversion. Measurements of both single-ended and single-to-balanced filters display bandwidth and out-of-band attenuation close to W-CDMA specifications. Minimum insertion loss of 2.9 dB is measured whereas strong spurious resonances are observed. Experimental results on spurious modes suppression using specific border region are discussed
Keywords :
acoustic resonator filters; aluminium compounds; bulk acoustic wave devices; code division multiple access; molybdenum; silicon compounds; tungsten; 2.9 dB; AlN; Bragg mirror; Mo; SiN-SiOC; W-SiO2; WCDMA applications; aluminum nitride resonators; bulk acoustic wave coupled resonator filter; coupled resonator filters; galvanic isolation; insertion loss; molybdenum electrodes; single-ended filters; single-to-balanced conversion; single-to-balanced filters; spurious modes suppression; spurious resonances; wideband code division multiple access; Acoustic waves; Aluminum nitride; Dielectric loss measurement; Dielectric measurements; Dielectrics and electrical insulation; Electrodes; Manufacturing; Multiaccess communication; Resonator filters; Silicon compounds;
Conference_Titel :
Ultrasonics Symposium, 2006. IEEE
Conference_Location :
Vancouver, BC
Print_ISBN :
1-4244-0201-8
Electronic_ISBN :
1051-0117
DOI :
10.1109/ULTSYM.2006.216
