6H-5 Design, Elaboration and Characterization of Coupled Resonator Filters for WCDMA Applications

Author

Volatier, A. ; Defay, E. ; Hari, A.N. ; Carpentier, J.F. ; Ancey, P. ; Dubus, B.

Author_Institution

STMicroelectronics, FTM Crolles

fYear

2006

fDate

2-6 Oct. 2006

Firstpage

829

Lastpage

832

Abstract

This work presents the design, manufacturing and characterization of bulk acoustic wave coupled resonator filter (BAW CRF) for W-CDMA applications. Aluminum nitride resonators with molybdenum electrodes are acoustically coupled through a W/SiO₂ multi-layered stack and insulated by a fully dielectric SiN/SiOC Bragg mirror. This configuration provides galvanic isolation between input and output making CRF suitable for single-to-balanced conversion. Measurements of both single-ended and single-to-balanced filters display bandwidth and out-of-band attenuation close to W-CDMA specifications. Minimum insertion loss of 2.9 dB is measured whereas strong spurious resonances are observed. Experimental results on spurious modes suppression using specific border region are discussed

Keywords

acoustic resonator filters; aluminium compounds; bulk acoustic wave devices; code division multiple access; molybdenum; silicon compounds; tungsten; 2.9 dB; AlN; Bragg mirror; Mo; SiN-SiOC; W-SiO₂; WCDMA applications; aluminum nitride resonators; bulk acoustic wave coupled resonator filter; coupled resonator filters; galvanic isolation; insertion loss; molybdenum electrodes; single-ended filters; single-to-balanced conversion; single-to-balanced filters; spurious modes suppression; spurious resonances; wideband code division multiple access; Acoustic waves; Aluminum nitride; Dielectric loss measurement; Dielectric measurements; Dielectrics and electrical insulation; Electrodes; Manufacturing; Multiaccess communication; Resonator filters; Silicon compounds;

fLanguage

English

Publisher

ieee

Conference_Titel

Ultrasonics Symposium, 2006. IEEE

Conference_Location

Vancouver, BC

ISSN

1051-0117

Print_ISBN

1-4244-0201-8

Electronic_ISBN

1051-0117

Type

conf

DOI

10.1109/ULTSYM.2006.216

Filename

4152072