3K-5 Electrical Parameter Extraction of a Flexural Plate Wave Device Using the Finite Element Method

Author

Matthews, G.I. ; Ippolito, S.J. ; Wlodarski, W. ; Kalantar-zadeh, K.

Author_Institution

Sch. of Electr. & Comput. Eng., RMIT Univ., Melbourne, Vic.

fYear

2006

fDate

2-6 Oct. 2006

Firstpage

1136

Lastpage

1139

Abstract

A study was conducted on the use of the Finite Element (FE) method to determine key electrical parameters of a Flexural Plate Wave (FPW) device. This paper illustrates that the FE method can be successfully applied to extract admittance and frequency response characteristics of complex acoustic wave devices. Second order effects such as electromagnetic feedthrough, triple transit and diffraction can be accounted for, which cannot be easily evaluated concurrently by other methods. Excellent agreement has been achieved between this novel approach and an alternative formulation based on a spectral Green´s function

Keywords

Green´s function methods; finite element analysis; surface acoustic wave devices; surface acoustic waves; ANSYS; Lamb wave; acoustic wave devices; admittance response; diffraction; electrical parameter extraction; electromagnetic feedthrough; finite element method; flexural plate wave device; frequency response; second order effects; spectral Green´s function; triple transit; Acoustic devices; Acoustic waves; Biomedical acoustics; Electrodes; Finite element methods; Gold; Green´s function methods; Parameter extraction; Piezoelectric materials; Zinc oxide;

fLanguage

English

Publisher

ieee

Conference_Titel

Ultrasonics Symposium, 2006. IEEE

Conference_Location

Vancouver, BC

ISSN

1051-0117

Print_ISBN

1-4244-0201-8

Electronic_ISBN

1051-0117

Type

conf

DOI

10.1109/ULTSYM.2006.290

Filename

4152146