Title :
Issues in MEMS macromodeling
Author_Institution :
Dept. of Electr. & Comput. Eng., Carnegie Mellon Univ., Pittsburgh, PA, USA
Abstract :
AHDL modeling of MEMS components for system simulation is slowly maturing, however many issues remain regarding interoperability and composability. A discussion of MEMS natures, hierarchy and model partitioning helps to introduce the issues. Specific conventions for interoperability include choice of component reference frame and associated reference directions. A composite discipline extension to AHDLs is proposed to enable a single-port representation of micromechanical connection points in 2D and 3D space.
Keywords :
circuit simulation; digital simulation; hardware description languages; micromechanical devices; open systems; semiconductor device models; AHDL modeling; MEMS components; MEMS macromodeling; interoperability; microelectromechanical systems; micromechanical connection points; single port representation; system simulation; Electronic circuits; Fabrication; Libraries; Microelectromechanical systems; Microelectronics; Micromechanical devices; Microstructure; Robots; Springs; Thermal stresses;
Conference_Titel :
Behavioral Modeling and Simulation, 2003. BMAS 2003. Proceedings of the 2003 International Workshop on
Print_ISBN :
0-7803-8135-1
DOI :
10.1109/BMAS.2003.1249859
