DocumentCode
2353596
Title
P1I-5 Micro-Machined, All Quartz Package, Passive Wireless SAW Pressure and Temperature Sensor
Author
Lardat, R. ; Penavaire, L. ; Menage, P. ; Chommeloux, L. ; Huet, H. ; Lestrat, C. ; Pastureaud, T. ; Haon, F. ; Steichen, W. ; Ballandras, S. ; Heider, G.
Author_Institution
TEMEX, Sophia Antipolis
fYear
2006
fDate
2-6 Oct. 2006
Firstpage
1441
Lastpage
1444
Abstract
An example of SAW P&T sensor is shown. This sensor is to operate for TPMS using the 434 MHz ISM band. Design of this sensor is based on simplicity, leading to micro-machined all quartz SAW device. Details of design process, realization and sensor responses are shown
Keywords
micromachining; pressure sensors; quartz; surface acoustic wave sensors; temperature sensors; wafer bonding; 434 MHz; ISM band; TPMS; all quartz SAW device; glass frit; micromachining; passive wireless SAW pressure sensor; passive wireless SAW temperature sensor; perturbation theory; wafer bonding; Manufacturing; Mechanical sensors; Packaging; Process design; Resonance; Resonant frequency; Surface acoustic wave devices; Surface acoustic waves; Temperature sensors; Wireless sensor networks;
fLanguage
English
Publisher
ieee
Conference_Titel
Ultrasonics Symposium, 2006. IEEE
Conference_Location
Vancouver, BC
ISSN
1051-0117
Print_ISBN
1-4244-0201-8
Electronic_ISBN
1051-0117
Type
conf
DOI
10.1109/ULTSYM.2006.363
Filename
4152219
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