DocumentCode
235383
Title
Demonstration of TCNCP flip chip reliability with 30μm pitch Cu bump and substrate with thin Ni and thick Au surface finish
Author
Weihong Zhang ; Shengping Hong ; Xiaolong Yan ; Feng Zhou ; Hailun Lu ; Haijun Shen ; Tonglong Zhang
Author_Institution
Nantong Fujitsu Microelectron. Co., Ltd., Nantong, China
fYear
2014
fDate
27-30 May 2014
Firstpage
1622
Lastpage
1627
Abstract
Recently, TCNCP (Thermal Compression with Non-Conductive Paste) flip chip technology has been adopted for various devices because of high demand for large bump density. Fine pitch micro Cu bumps are usually connected to trace on the substrate (Bump on Trace, BOT) due to space limitation on substrate. In this study, TCNCP technology was used to attach die onto substrate trace with surface finish of thin Ni (0.1um) and thick Au (0.4um). The micro Cu bump used in the device under test has a dome shaped Sn-based solder cap of 13um in height. The ratio of Au layer plated on the substrate trace to Sn cap on the Cu bump is about 10 wt%, which is far beyond threshold value of 3 wt% for Au embrittlement. However, it was proved that the micro joint obtained with TCNCP can pass TCT 1000 cycles, HTS 1000hours and uHAST 192hrs without failure. SEM/EDX study on HTS samples (0hr, 500hr, 1000hr) showed that the joints had a large amount of IMC formed mainly consisting of (CuxAu1-x)6Sn5 phase after reflow and independent Cu3Sn phase formed near to die bump at a later stage during HTS test. Although AuSn4 was present in 0hr sample, it disappeared later. No Ni was detected. Phase segregation appeared near to die bump when HTS time went up to 1000hrs. No crack and void were found at that point.
Keywords
copper alloys; flip-chip devices; gold alloys; integrated circuit packaging; integrated circuit reliability; nickel alloys; surface finishing; Au; Cu; HTS test; Ni; TCNCP flip chip reliability; bump density; die bump; fine pitch microbump; intermetallic compound formation; nonconductive paste; phase segregation; size 30 nm; surface finishing; thermal compression; Bonding; Gold; High-temperature superconductors; Joints; Nickel; Substrates; Tin;
fLanguage
English
Publisher
ieee
Conference_Titel
Electronic Components and Technology Conference (ECTC), 2014 IEEE 64th
Conference_Location
Orlando, FL
Type
conf
DOI
10.1109/ECTC.2014.6897512
Filename
6897512
Link To Document