• DocumentCode
    2353865
  • Title

    P2M-2 Acoustic Losses in Busbars

  • Author

    Meltaus, Johanna ; Hong, Seong Su ; Plessky, Victor P.

  • Author_Institution
    Samsung Electro-Mechanic Co., Ltd., Suwon
  • fYear
    2006
  • fDate
    2-6 Oct. 2006
  • Firstpage
    1859
  • Lastpage
    1862
  • Abstract
    Radiation of acoustic waves from the contact electrodes (busbars) of surface acoustic wave (SAW) devices on high-coupling piezoelectric substrates, such as 42deg-LiTaO3, is demonstrated both with finite-element-method (FEM) simulations and with experimental data. This acoustic radiation, as well as resistive losses, significantly decrease the Q-value of the busbars. Experimental measurements on test structures show Q-values as low as about 10
  • Keywords
    acoustic generators; busbars; finite element analysis; lithium compounds; piezoelectric materials; surface acoustic wave transducers; LiTaO3; Q-value; acoustic losses; acoustic wave radiation; busbars; contact electrodes; finite element method; high-coupling piezoelectric substrate; resistive losses; surface acoustic wave devices; Acoustic devices; Acoustic waves; Capacitance; Electrodes; Gratings; Periodic structures; Piezoelectric materials; Radio frequency; Solids; Surface acoustic waves;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Ultrasonics Symposium, 2006. IEEE
  • Conference_Location
    Vancouver, BC
  • ISSN
    1051-0117
  • Print_ISBN
    1-4244-0201-8
  • Electronic_ISBN
    1051-0117
  • Type

    conf

  • DOI
    10.1109/ULTSYM.2006.377
  • Filename
    4152233