DocumentCode
2353865
Title
P2M-2 Acoustic Losses in Busbars
Author
Meltaus, Johanna ; Hong, Seong Su ; Plessky, Victor P.
Author_Institution
Samsung Electro-Mechanic Co., Ltd., Suwon
fYear
2006
fDate
2-6 Oct. 2006
Firstpage
1859
Lastpage
1862
Abstract
Radiation of acoustic waves from the contact electrodes (busbars) of surface acoustic wave (SAW) devices on high-coupling piezoelectric substrates, such as 42deg-LiTaO3, is demonstrated both with finite-element-method (FEM) simulations and with experimental data. This acoustic radiation, as well as resistive losses, significantly decrease the Q-value of the busbars. Experimental measurements on test structures show Q-values as low as about 10
Keywords
acoustic generators; busbars; finite element analysis; lithium compounds; piezoelectric materials; surface acoustic wave transducers; LiTaO3; Q-value; acoustic losses; acoustic wave radiation; busbars; contact electrodes; finite element method; high-coupling piezoelectric substrate; resistive losses; surface acoustic wave devices; Acoustic devices; Acoustic waves; Capacitance; Electrodes; Gratings; Periodic structures; Piezoelectric materials; Radio frequency; Solids; Surface acoustic waves;
fLanguage
English
Publisher
ieee
Conference_Titel
Ultrasonics Symposium, 2006. IEEE
Conference_Location
Vancouver, BC
ISSN
1051-0117
Print_ISBN
1-4244-0201-8
Electronic_ISBN
1051-0117
Type
conf
DOI
10.1109/ULTSYM.2006.377
Filename
4152233
Link To Document