P2M-4 Optimization of STW Resonator by Using FEM/BEM

Author

Plessky, Victor ; Plessky, V. ; Wang, Hao ; Wu, Haodong ; Shui, Yongan

Author_Institution

Inst. of Acoust., Nanjing Univ.

fYear

2006

fDate

2-6 Oct. 2006

Firstpage

1863

Lastpage

1865

Abstract

STW (surface transverse wave) resonators on quartz have been widely used in temperature stable oscillator as frequency source applications. In this paper, we use the software FEMSAW based on the FEM/BEM theory to study STW resonator. To simulate the STW resonator with enough accuracy, the FEM/BEM is modified by introducing two parameters to include the propagation attenuation due to material itself in substrate and the loss in Al electrode. By numerical experiment, we found that for the synchronous resonator there exists an optimum thickness of Al electrode, and the optimum thickness depends on center frequency of resonator. We also found that there is an optimum ratio of pitches of reflector and IDT, at which maximum Q-factor can be achieved

Keywords

Q-factor; acoustic wave propagation; finite element analysis; quartz; surface acoustic wave resonators; Al electrode loss; FEM/BEM theory; FEMSAW; IDT; Q-factor; STW resonator optimization; frequency source; propagation attenuation; quartz; reflector; resonator center frequency; substrate; surface transverse wave resonators; synchronous resonator; temperature stable oscillator; Application software; Attenuation; Electrodes; Frequency; Oscillators; Predictive models; Propagation losses; Q factor; Rayleigh scattering; Temperature;

fLanguage

English

Publisher

ieee

Conference_Titel

Ultrasonics Symposium, 2006. IEEE

Conference_Location

Vancouver, BC

ISSN

1051-0117

Print_ISBN

1-4244-0201-8

Electronic_ISBN

1051-0117

Type

conf

DOI

10.1109/ULTSYM.2006.378

Filename

4152234