P1L-3 Characteristics of LLSAW in Periodical Systems of Layered Electrodes

Author

Grigorievski, V.I. ; Gulyaev, Y.V. ; Plessky, V.P. ; Hong, S.S. ; Makkonen, T.

Author_Institution

IRE, RAS, Moscow

fYear

2006

fDate

2-6 Oct. 2006

Firstpage

1513

Lastpage

1516

Abstract

Resonant characteristics of longitudinal leaky surface acoustic waves (LLSAW) in infinite periodic interdigital transducers (IDT) with layered electrodes are calculated. An electrode is assumed to be consisted of two parts - under-layer of crystal material and top layer of aluminum. The simplest structure is a periodic array of grooves of rectangular shape etched in the substrate with aluminum (AL) electrodes positioned on tops between adjacent grooves. Such a structure on YZ-cut of-lithium niobate (YZ-LN) shows calculated quality factors of two times larger as compared to AL electrodes on smooth surface with dissipation in electrodes taken into account. As an additional combination the under-layer of titanium-dioxide (TiO₂)-AL is considered. This combination shows quality factors approximately three times larger than the structure with AL electrodes on smooth surface

Keywords

Q-factor; acoustic resonance; aluminium; electrodes; interdigital transducers; lithium compounds; surface acoustic wave resonators; surface acoustic waves; titanium compounds; LLSAW; LiNbO₃-Al; TiO₂-Al; acoustic resonance; interdigital transducers; layered electrodes; lithium niobate; longitudinal leaky surface acoustic waves; periodical systems; titanium-dioxide; Acoustic transducers; Acoustic waves; Aluminum; Crystalline materials; Electrodes; Periodic structures; Q factor; Resonance; Shape; Surface acoustic waves;

fLanguage

English

Publisher

ieee

Conference_Titel

Ultrasonics Symposium, 2006. IEEE

Conference_Location

Vancouver, BC

ISSN

1051-0117

Print_ISBN

1-4244-0201-8

Electronic_ISBN

1051-0117

Type

conf

DOI

10.1109/ULTSYM.2006.384

Filename

4152240