Title :
P1L-3 Characteristics of LLSAW in Periodical Systems of Layered Electrodes
Author :
Grigorievski, V.I. ; Gulyaev, Y.V. ; Plessky, V.P. ; Hong, S.S. ; Makkonen, T.
Author_Institution :
IRE, RAS, Moscow
Abstract :
Resonant characteristics of longitudinal leaky surface acoustic waves (LLSAW) in infinite periodic interdigital transducers (IDT) with layered electrodes are calculated. An electrode is assumed to be consisted of two parts - under-layer of crystal material and top layer of aluminum. The simplest structure is a periodic array of grooves of rectangular shape etched in the substrate with aluminum (AL) electrodes positioned on tops between adjacent grooves. Such a structure on YZ-cut of-lithium niobate (YZ-LN) shows calculated quality factors of two times larger as compared to AL electrodes on smooth surface with dissipation in electrodes taken into account. As an additional combination the under-layer of titanium-dioxide (TiO2)-AL is considered. This combination shows quality factors approximately three times larger than the structure with AL electrodes on smooth surface
Keywords :
Q-factor; acoustic resonance; aluminium; electrodes; interdigital transducers; lithium compounds; surface acoustic wave resonators; surface acoustic waves; titanium compounds; LLSAW; LiNbO3-Al; TiO2-Al; acoustic resonance; interdigital transducers; layered electrodes; lithium niobate; longitudinal leaky surface acoustic waves; periodical systems; titanium-dioxide; Acoustic transducers; Acoustic waves; Aluminum; Crystalline materials; Electrodes; Periodic structures; Q factor; Resonance; Shape; Surface acoustic waves;
Conference_Titel :
Ultrasonics Symposium, 2006. IEEE
Conference_Location :
Vancouver, BC
Print_ISBN :
1-4244-0201-8
Electronic_ISBN :
1051-0117
DOI :
10.1109/ULTSYM.2006.384
