Optimization design of a capacitive microaccelerometer

This paper presents a capacitive micromachined accelerometer with a comb-finger and cantilever beam structure. The principle of operation of the accelerometer, open-loop performance and closed-loop performance are introduced. A comparison between FEA and theoretical analysis is given, and the result is in good agreement with the prediction. Based the simulation result, the sensor behavior strongly depend on various design parameters. The desired performance parameters, displacement sensitivity and resolution can be obtained by adjusting the structure. The beam design optimization is performed, and the optimized design parameters are achieved, including beam length 500um, beam width 600um, and beam thickness 6um.