Tungsten-rich deposits at anode using carbon nanotube emitters

Author

Arai, Fumihito ; Liu, Pou ; Dong, Luin ; Nakajima, Masahiro ; Fukuda, Toshio

Author_Institution

Dept. of Micro Syst. Eng., Nagoya Univ., Japan

fYear

2003

fDate

19-22 Oct. 2003

Firstpage

205

Lastpage

210

Abstract

Electron-beam-induced deposition (EBID) with two kinds of organometallic compounds including tungsten hexacarbonyl (W(CO)₆) and dimethyl-gold ((CH₃)₂(C₅H₇O₂)Au) as precursors is presented so as to obtain conductive nanostructures. Their resistivity and growth rate are measured, and the compositions of deposits are analyzed. To improve the resolution of the deposit and to reduce energy consumption, EBID with multiwalled carbon nanotubes (MWNTs) as emitters is demonstrated. Factors influencing field emission characteristics of MWNT emitters are analyzed. In the deposit at anode by using W(CO)₆, mass of the tungsten reaches up to about 80% among the compositions.

Keywords

anodes; carbon nanotubes; conducting materials; electron beam deposition; electron field emission; nanostructured materials; nanotube devices; tungsten compounds; W(CO)₆; anode; carbon nanotube emitters; conductive nanostructures; dimethyl-gold; electron-beam-induced deposition; field emission characteristics; tungsten hexacarbonyl; tungsten-rich deposits; Anodes; Carbon dioxide; Carbon nanotubes; Electron emission; Mechanical factors; Microscopy; Systems engineering and theory; Tungsten; Tunneling; Voltage;

fLanguage

English

Publisher

ieee

Conference_Titel

Micromechatronics and Human Science, 2003. MHS 2003. Proceedings of 2003 International Symposium on

Print_ISBN

0-7803-8165-3

Type

conf

DOI

10.1109/MHS.2003.1249933

Filename

1249933