Title :
Development of quartz etching database and 3-D micromachining simulation system
Author :
Cheng, Di ; Sato, Kazuo ; Shikida, Mitsuhiro ; Ono, Atsushi ; Kenji Sato ; Asaumi, Kuzuo ; Iriye, Yusuroh
Author_Institution :
Dept. of Microsystem Eng., Nagoya Univ., Japan
Abstract :
We have characterized anisotropic etching properties of single-crystal quartz by using a spherical specimen made of alpha-quartz. Spherical specimen allowed us to measure etching rates for a number of orientations with a single etching operation. Measured etching-rates further allowed us to perform complete 3-D etching simulation for arbitrary oriented quartz wafer.
Keywords :
digital simulation; etching; micromachining; quartz; visual databases; 3D micromachining simulation system; alpha-quartz; anisotropic etching properties; arbitrary oriented quartz wafer; quartz etching database; single etching operation; single-crystal quartz; spherical specimen; Anisotropic magnetoresistance; Crystallography; Data engineering; Databases; Etching; Performance evaluation; Probes; Rough surfaces; Silicon; Surface roughness;
Conference_Titel :
Micromechatronics and Human Science, 2003. MHS 2003. Proceedings of 2003 International Symposium on
Print_ISBN :
0-7803-8165-3
DOI :
10.1109/MHS.2003.1249949
