Title :
Leak rate measurement comparisons [package seals]
Author :
Romenesko, Bruce M. ; Ely, Kevin J.
Author_Institution :
Appl. Phys. Lab., Johns Hopkins Univ., Laurel, MD, USA
Abstract :
Gross leak and fine leak test results on a series of 527 parts were checked by repeating the measurements or by using different test methods to gauge the accuracy of the methods. The parts had a large 17 cm3 internal volume and were sealed in a laced sealing ambient using a target value of 10% helium. A spreadsheet was used to compare the initial fine and gross leak data with the verifying tests. The verifying tests consisted primarily of a repetition of the initial ambient gross leak test on all 527 parts and a fine leak test based on the radioisotope method on a sample of 41 parts. These comparisons were made to gauge error rates for the different methods and as a check on the accuracy of the Howl-Mann mass ratio scaling used in the “flexible” fine leak method
Keywords :
hybrid integrated circuits; integrated circuit packaging; integrated circuit testing; leak detection; seals (stoppers); He; Howl-Mann mass ratio scaling; error rates; fine leak test; initial ambient gross leak test; laced sealing ambient; leak data comparisons; leak rate measurement; microelectronic package seals; radioisotope method; Aluminum; Circuit testing; Connectors; Equations; Gamma ray detectors; Helium; Leak detection; Microelectronics; Radioactive materials; Seals;
Conference_Titel :
Electronic Components and Technology Conference, 1995. Proceedings., 45th
Conference_Location :
Las Vegas, NV
Print_ISBN :
0-7803-2736-5
DOI :
10.1109/ECTC.1995.514401