DocumentCode :
235510
Title :
Preface
fYear :
2014
fDate :
19-21 Nov. 2014
Firstpage :
1
Lastpage :
1
Abstract :
Presents the introductory welcome message from the conference proceedings. May include the conference officers´ congratulations to all involved with the conference event and publication of the proceedings record.
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Planarization/CMP Technology (ICPT), 2014 International Conference on
Conference_Location :
Kobe, Japan
Print_ISBN :
978-1-4799-5556-5
Type :
conf
DOI :
10.1109/ICPT.2014.7017226
Filename :
7017226
Link To Document :
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