Title :
Microfabrication process for high-frequency power-conversion transformers
Author :
Sullivan, Charles R. ; Sander, Seth R.
Author_Institution :
Dept. of Electr. Eng. & Comput. Sci., California Univ., Berkeley, CA, USA
Abstract :
A process for microfabrication of transformers for high-frequency power conversion applications is described. The process uses multilayer films of NiFe/SiO2 magnetic material and copper coils deposited on a silicon substrate. Transformers less than 100 μm thick are designed to handle 1.7 W each in an area 1.5 by 5.4 mm. Coil measurements confirm predicted DC and AC resistance. Applications to a 10 W, 10 MHz DC-DC power converter are discussed
Keywords :
DC-DC power convertors; coils; high-frequency transformers; magnetic materials; magnetic multilayers; power transformers; 1.5 mm; 1.7 W; 10 MHz; 10 W; 5.4 mm; AC resistance; Cu; DC resistance; DC-DC power converter; NiFe-SiO2; Si; applications; coils; high-frequency power conversion; magnetic material; measurements; microfabrication; multilayer films; substrate; transformers; Coils; Copper; Electrical resistance measurement; Magnetic films; Magnetic materials; Magnetic multilayers; Power conversion; Semiconductor films; Silicon; Transformers;
Conference_Titel :
Power Electronics Specialists Conference, 1995. PESC '95 Record., 26th Annual IEEE
Conference_Location :
Atlanta, GA
Print_ISBN :
0-7803-2730-6
DOI :
10.1109/PESC.1995.474889
