Title :
Surface potential change with droplet formation and Cu watermark growth by electrochemical oxidation resulting therefrom
Author :
Shima, Shohei ; Hamada, Satomi ; Wada, Yasuhiro ; Fukunaga, Akira
Author_Institution :
Adv. Technol. Div., Ebara Corp., Fujisawa, Japan
Abstract :
To reveal the mechanism of watermark formation on a Cu film, the Volta potential in a droplet area on Cu was evaluated using the scanning Kelvin-probe method. The droplet area on Cu exhibited an upward convex potential profile, indicating that the electrochemical reactions were more active in the areas around the droplet than at the center of the droplet. On the other hand, Si exhibited a profile converse to that of Cu: electrochemical reactions were more active at the center of the droplet area than in the areas around it. These evaluations revealed that the pinning and ring-shaped watermark formation at the droplet area on a Cu film resulted from the said Volta potential profile.
Keywords :
copper; drops; electrochemical analysis; oxidation; surface cleaning; surface potential; Cu; Cu film; Cu watermark growth; Volta potential profile; droplet formation; electrochemical oxidation; electrochemical reactions; pinning watermark formation; ring-shaped watermark formation; scanning Kelvin-probe method; surface potential change; Electric potential; Films; Kelvin; Probes; Silicon; Substrates; Watermarking;
Conference_Titel :
Planarization/CMP Technology (ICPT), 2014 International Conference on
Conference_Location :
Kobe
Print_ISBN :
978-1-4799-5556-5
DOI :
10.1109/ICPT.2014.7017253