Title :
P2P-8 Characterization Standard of CMUT Devices Based on Electrical Impedance Measurements
Author :
Teston, Franck ; Meynier, Cyril ; Jeanne, Edgard ; Felix, Nicolas ; Certon, Dominique
Author_Institution :
Univ. Francois Rabelais, Tours
Abstract :
A procedure for an electrical impedance characterization standard in air of CMUTs was reported. The electromechanical coupling factor was calculated by the low and high frequency capacity and the resonance and antiresonance frequencies measurements. The CMUT will be able to analyze and compared in terms of effective spring and mass with 1D model. The 1D model described the general behavior of the CMUT quite well, as long as first resonance/antiresonance mode and tensions below collapse were concerned
Keywords :
electric impedance measurement; electromechanical effects; micromechanical devices; ultrasonic transducers; CMUT devices; capacitive micromachined ultrasonic transducers; electrical impedance measurements; electromechanical coupling factor; Biomembranes; Electric variables measurement; Electrodes; Frequency; Impedance measurement; Measurement standards; Parasitic capacitance; Resonance; Shape measurement; Springs;
Conference_Titel :
Ultrasonics Symposium, 2006. IEEE
Conference_Location :
Vancouver, BC
Print_ISBN :
1-4244-0201-8
Electronic_ISBN :
1051-0117
DOI :
10.1109/ULTSYM.2006.496
