DocumentCode
2356232
Title
P2P-8 Characterization Standard of CMUT Devices Based on Electrical Impedance Measurements
Author
Teston, Franck ; Meynier, Cyril ; Jeanne, Edgard ; Felix, Nicolas ; Certon, Dominique
Author_Institution
Univ. Francois Rabelais, Tours
fYear
2006
fDate
2-6 Oct. 2006
Firstpage
1963
Lastpage
1966
Abstract
A procedure for an electrical impedance characterization standard in air of CMUTs was reported. The electromechanical coupling factor was calculated by the low and high frequency capacity and the resonance and antiresonance frequencies measurements. The CMUT will be able to analyze and compared in terms of effective spring and mass with 1D model. The 1D model described the general behavior of the CMUT quite well, as long as first resonance/antiresonance mode and tensions below collapse were concerned
Keywords
electric impedance measurement; electromechanical effects; micromechanical devices; ultrasonic transducers; CMUT devices; capacitive micromachined ultrasonic transducers; electrical impedance measurements; electromechanical coupling factor; Biomembranes; Electric variables measurement; Electrodes; Frequency; Impedance measurement; Measurement standards; Parasitic capacitance; Resonance; Shape measurement; Springs;
fLanguage
English
Publisher
ieee
Conference_Titel
Ultrasonics Symposium, 2006. IEEE
Conference_Location
Vancouver, BC
ISSN
1051-0117
Print_ISBN
1-4244-0201-8
Electronic_ISBN
1051-0117
Type
conf
DOI
10.1109/ULTSYM.2006.496
Filename
4152352
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