Title :
A new junction termination technique for power devices: resurf LDMOS with SIPOS layers
Author :
Charitat, G. ; Bouanane, M.A. ; Rossel, P.
Author_Institution :
CNRS
Keywords :
Bipolar transistors; Conductivity; Diodes; Doping; Electric breakdown; Integral equations; Medium voltage; Numerical analysis; Poisson equations; Surface resistance;
Conference_Titel :
Power Semiconductor Devices and ICs, 1992. ISPSD '92. Proceedings of the 4th International Symposium on
DOI :
10.1109/ISPSD.1992.991268