Title :
Study on evaluation method for polishing pad surface topography based on optical fourier transform
Author :
Khajornrungruang, Panart ; Suzuki, Kenji ; Kushida, Takashi ; Tajiri, Takahiro ; Matsuo, Hiroshi ; Mochizuki, Yoshihiro ; Hiyama, Hirokuni ; Kimura, K.
Author_Institution :
Dept. of Mech. Inf. Sci. & Technol., Kyushu Inst. of Technol. (KYUTECH), Fukuoka, Japan
Abstract :
An optical technique based on the optical Fourier transform has been developed to evaluate the characteristics of polishing pad surface topography. The power spectrum from the optical Fourier transform, which correlates with the diffracted light intensity distribution from the diffused reflection laser light of the polishing pad surface, is observed by an area sensor camera. Then, the correlation between the spatial frequency characteristic of the polishing pad topographies and the material removal rate are investigated.
Keywords :
Fourier transform optics; light diffraction; measurement by laser beam; optical microscopy; polishing; surface topography; surface topography measurement; light intensity distribution; optical Fourier transform; polishing pad surface topography; power spectrum; reflection laser; sensor camera; Fourier transforms; Materials; Optical reflection; Optical surface waves; Surface topography; Surface waves; Fourier transform; conditioning; laser; optical; polishing pad; surface topography;
Conference_Titel :
Planarization/CMP Technology (ICPT), 2014 International Conference on
Conference_Location :
Kobe
Print_ISBN :
978-1-4799-5556-5
DOI :
10.1109/ICPT.2014.7017281
