Title :
A new concept for high-voltage SOI devices
Author :
Wondrak, W. ; Held, R. ; Stein, E. ; Korec, J.
Author_Institution :
Daimler-Benz Research institute
Keywords :
Bonding; Cathodes; Dielectric devices; Dielectric substrates; Doping; Fabrication; Isolation technology; Semiconductor films; Silicon on insulator technology; Voltage;
Conference_Titel :
Power Semiconductor Devices and ICs, 1992. ISPSD '92. Proceedings of the 4th International Symposium on
DOI :
10.1109/ISPSD.1992.991286
