DocumentCode :
2356934
Title :
A new concept for high-voltage SOI devices
Author :
Wondrak, W. ; Held, R. ; Stein, E. ; Korec, J.
Author_Institution :
Daimler-Benz Research institute
fYear :
1992
fDate :
1992
Firstpage :
278
Lastpage :
281
Keywords :
Bonding; Cathodes; Dielectric devices; Dielectric substrates; Doping; Fabrication; Isolation technology; Semiconductor films; Silicon on insulator technology; Voltage;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Power Semiconductor Devices and ICs, 1992. ISPSD '92. Proceedings of the 4th International Symposium on
Type :
conf
DOI :
10.1109/ISPSD.1992.991286
Filename :
991286
Link To Document :
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