Title :
Modeling and characterization of SIPOS passivated, high voltage, N- and P-channel lateral resurf type DMOSFETs
Author :
Sakai, T. ; So, K.C. ; Shen, Z. ; Chow, T.P.
Author_Institution :
Rensselaer Polytechnic Institute
Keywords :
Analytical models; Capacitance-voltage characteristics; Conductivity; Contact resistance; Impurities; Permittivity; Photonic band gap; Power integrated circuits; Silicon; Voltage;
Conference_Titel :
Power Semiconductor Devices and ICs, 1992. ISPSD '92. Proceedings of the 4th International Symposium on
DOI :
10.1109/ISPSD.1992.991288