Title :
Development of radio-opaque silicon micro needles for medical diagnostics
Author :
Ruiqi, Lim ; Su, Nandar ; Chandrappan, Jayakrishnan ; Tang Shao Qiang ; Vaidyanathan, Kripesh ; Nagarajan, Ranganathan
Author_Institution :
Inst. of Microelectron., A*STAR (Agency for Sci., Technol. & Res.), Singapore, Singapore
Abstract :
In this paper, a method of fabricating radio opaque silicon micro needles for tissue labeling applications is reported. Cylindrical shaped micro needles ranging from 7 × 7 to 11 × 11 arrays with a pitch varying from 60 μm to 100μm are fabricated in silicon using a three step mask process. A backside cavity is generated under DRIE for filling the radiopaque material. Barium sulphate is filled in and a biocompatible sealing is provided to hold the radiopaque material inside. The fabricated needles provide a better contrast enhancement under x-ray imaging.
Keywords :
biological tissues; biomedical equipment; biomedical materials; elemental semiconductors; needles; silicon; DRIE; Si; X-ray imaging; barium sulphate; biocompatible sealing; cylindrical shaped microneedles; medical diagnostics; radio-opaque silicon microneedles; radiopaque material; step mask process; tissue labeling applications;
Conference_Titel :
Electronics Packaging Technology Conference (EPTC), 2010 12th
Conference_Location :
Singapore
Print_ISBN :
978-1-4244-8560-4
Electronic_ISBN :
978-1-4244-8561-1
DOI :
10.1109/EPTC.2010.5702611
