DocumentCode :
2357371
Title :
Miniaturized OCT system with optimized housing design
Author :
Sheng, Kelvin Chen Wei ; Aibin, Yu ; Xiaojing, Mu ; Hua, Feng Han ; Wei, Tan Chee
Author_Institution :
Inst. of Microelectron., A*STAR (Agency for Sci., Technol. & Res.), Singapore, Singapore
fYear :
2010
fDate :
8-10 Dec. 2010
Firstpage :
94
Lastpage :
97
Abstract :
An optical probe is developed for imaging in an optical coherence tomography (OCT) system and a 3D micro mirror is used for moving the beam from the source to the point of interest on the sample. The completed probe uses a dual axis electro-thermal actuated mirror, silicon optical bench (SiOB)-based probe. The silicon optical bench is designed and micro machined to assemble the fiber, lens and the 3D micro mirror device and inserted into a bio-compatible circular housing. A honey combed structure is fabricated to assist in prevent bridging of the solder balls during reflow. A toroidal lens is being use to correct the beam shape caused by the compatible circular housing.
Keywords :
electric actuators; electronics packaging; honeycomb structures; lenses; micro-optomechanical devices; micromachining; micromirrors; optical fibres; optical tomography; probes; silicon; solders; 3D micro mirror; MEMS; biocompatible circular housing; dual axis electrothermal actuated mirror; honey combed structure; housing design; micromachining; miniaturized OCT system; optical coherence tomography; optical fiber; optical probe; optimized housing design; silicon optical bench; solder balls; toroidal lens;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Electronics Packaging Technology Conference (EPTC), 2010 12th
Conference_Location :
Singapore
Print_ISBN :
978-1-4244-8560-4
Electronic_ISBN :
978-1-4244-8561-1
Type :
conf
DOI :
10.1109/EPTC.2010.5702613
Filename :
5702613
Link To Document :
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