Fiber image techniques in digital stereomicroscopy

On the basis of the principle of structured light and phase shifting, a novel digital stereomicroscopes system for micro-3D inspection is presented in this paper. Because the image fiber has many advantages like direction changing and long distance transmitting without extra optics, this system also adopts it to project the structured light instead of the pure optical systems. Thus, the measurement head is very small, the measurement distance and orientation could be changed expediently. Experiments showed this is a useful system to measure the 3D profile of meso- to micro-scaled parts, such as the MEMS product.