Case study of embedded memory failure analysis for dislocation issue

Embedded memory is an integrated on-chip memory that supports the logic core to accomplish intended functions. High-performance embedded memory is a key component in VLSI, because of its high-speed and wide bus-width capability, which eliminates inter-chip communication. In this paper, embedded memory device and CMOS logic is integrated on-chip and it is a more complex of process technology compared with stand-alone memory. For the process engineering, we are always confronted with many problems, especially, the dislocation that causes some failures.