Title :
P3M-6 Dynamical Modelling and Position Control of Ultrasonic Piezoelectric Positioning Stage
Author :
Holub, Ondoej ; Cimprich, Thomas ; Ferreira, Antoine ; Hurak, Zdenik ; Breguet, Jean-Marc
Author_Institution :
Dept. of Control Eng., Czech Tech. Univ., Prague
Abstract :
The paper describes development of a feedback position controller for a new type of monolithic "hybrid" ultrasonic motor. The goal of the controller design was to demonstrate the main advantage of this piezoelectric motor -high speed and high accuracy at the same time. Tracking of 1 mm steps with 30 nm error in down to 100 ms has been achieved
Keywords :
controllers; feedback; position control; small electric machines; ultrasonic motors; feedback position controller; monolithic hybrid ultrasonic motor; piezoelectric motor; position control; ultrasonic piezoelectric positioning stage; Control engineering; Feedback; Frequency; Leg; Piezoelectric actuators; Position control; Position measurement; Robot sensing systems; Robot vision systems; Voltage;
Conference_Titel :
Ultrasonics Symposium, 2006. IEEE
Conference_Location :
Vancouver, BC
Print_ISBN :
1-4244-0201-8
Electronic_ISBN :
1051-0117
DOI :
10.1109/ULTSYM.2006.575
