New technique for acquiring dead pixel free and fine inspection image of advanced LSI package with rough surface using scanning acoustic tomograph

Author

Kitami, Kaoru ; Murai, Masakatsu ; Sugaya, Natsuki ; Kikuchi, Osamu ; Ohno, S.

Author_Institution

Hitachi Power Solutions Co., Ltd., Hitachi, Japan

fYear

2014

fDate

June 30 2014-July 4 2014

Firstpage

340

Lastpage

343

Abstract

We have developed three new gate tracking functions to acquire dead-pixel-free and fine inspection images for advanced LSI packages with rough surface using a scanning acoustic tomo-graph. These are predicted surface gate tracking, double surface gate tracking and predicted S2-gate tracking methods. The advantages of these functions are demonstrated by using various test samples.

Keywords

acoustic microscopes; image processing; inspection; integrated circuit packaging; large scale integration; object tracking; rough surfaces; acquiring dead pixel free; advanced LSI package; double surface gate tracking; fine inspection image; large-scale integration circuits; predicted S2-gate tracking methods; predicted surface gate tracking functions; rough surface; scanning acoustic tomograph; test samples; Inspection; Large scale integration; Logic gates; Rough surfaces; Surface roughness; Surface waves; Transducers;

fLanguage

English

Publisher

ieee

Conference_Titel

Physical and Failure Analysis of Integrated Circuits (IPFA), 2014 IEEE 21st International Symposium on the

Conference_Location

Marina Bay Sands

ISSN

1946-1542

Print_ISBN

978-1-4799-3931-2

Type

conf

DOI

10.1109/IPFA.2014.6898147

Filename

6898147