Title :
New technique for acquiring dead pixel free and fine inspection image of advanced LSI package with rough surface using scanning acoustic tomograph
Author :
Kitami, Kaoru ; Murai, Masakatsu ; Sugaya, Natsuki ; Kikuchi, Osamu ; Ohno, S.
Author_Institution :
Hitachi Power Solutions Co., Ltd., Hitachi, Japan
fDate :
June 30 2014-July 4 2014
Abstract :
We have developed three new gate tracking functions to acquire dead-pixel-free and fine inspection images for advanced LSI packages with rough surface using a scanning acoustic tomo-graph. These are predicted surface gate tracking, double surface gate tracking and predicted S2-gate tracking methods. The advantages of these functions are demonstrated by using various test samples.
Keywords :
acoustic microscopes; image processing; inspection; integrated circuit packaging; large scale integration; object tracking; rough surfaces; acquiring dead pixel free; advanced LSI package; double surface gate tracking; fine inspection image; large-scale integration circuits; predicted S2-gate tracking methods; predicted surface gate tracking functions; rough surface; scanning acoustic tomograph; test samples; Inspection; Large scale integration; Logic gates; Rough surfaces; Surface roughness; Surface waves; Transducers;
Conference_Titel :
Physical and Failure Analysis of Integrated Circuits (IPFA), 2014 IEEE 21st International Symposium on the
Conference_Location :
Marina Bay Sands
Print_ISBN :
978-1-4799-3931-2
DOI :
10.1109/IPFA.2014.6898147
