Title :
P3R-4 Stagger Tuned cMUT Array for Wideband Airborne Applications
Author :
Olcum, Selim ; Atalar, Abdullah ; Koymen, Hayrettin ; Senlik, Muhammed N.
Author_Institution :
Dept. of Electr. & Electron. Eng., Bilkent Univ., Ankara, Turkey
Abstract :
In this study, we explore the limits of cMUTs in air-borne applications. First we investigate the ways of increasing the bandwidth of a single cMUT cell in air. The effect of array operation is also considered in order to increase the radiation resistance seen by the transducer. We calculate the bandwidth of a stagger tuned cMUT array. It is shown in this paper that more than 60% bandwidth can be obtained by three staggered frequencies.
Keywords :
micromachining; ultrasonic applications; ultrasonic transducer arrays; array operation; cMUT cell bandwidth increase; capacitive micromachined ultrasonic transducer; radiation resistance; stagger tuned cMUT array; wideband airborne applications; Bandwidth; Biomembranes; Equivalent circuits; Frequency; Impedance; Narrowband; Piezoelectric transducers; Q factor; Ultra wideband technology; Ultrasonic transducers;
Conference_Titel :
Ultrasonics Symposium, 2006. IEEE
Conference_Location :
Vancouver, BC
Print_ISBN :
1-4244-0201-8
Electronic_ISBN :
1051-0117
DOI :
10.1109/ULTSYM.2006.598
