Title :
Correlation of digital image metrics to production ADC matching performance
Author :
Blais, Jennifer ; Fischer, Verlyn ; Moalem, Yoel ; Saunders, Matthew
Author_Institution :
Microelectron. Div., IBM Corp., Essex Junction, VT, USA
Abstract :
Automatic defect classification tool matching requires that consistent quality images are captured on all tools. Image metrics have been developed and the variance of these metrics have been correlated to classifier matching. It is shown that in order to maintain tool matching, image color balance, focus, and shadowing must be monitored and maintained at acceptable values. Of these metrics, inappropriate color balance has the greatest effect on matching
Keywords :
automatic optical inspection; fault location; focusing; image classification; image colour analysis; integrated circuit measurement; integrated circuit yield; automatic defect classification tool matching; classifier matching; consistent quality image capture; digital image metric correlation; image color balance; image focus; image metric variance; image metrics; image quality; image shadowing; inappropriate color balance; production ADC matching performance; tool matching; Apertures; Digital images; Focusing; Inspection; Lighting; Monitoring; Noise measurement; Production; Shadow mapping; Testing;
Conference_Titel :
Advanced Semiconductor Manufacturing Conference and Workshop, 1998. 1998 IEEE/SEMI
Conference_Location :
Boston, MA
Print_ISBN :
0-7803-4380-8
DOI :
10.1109/ASMC.1998.731407
