Correlation of digital image metrics to production ADC matching performance

Author

Blais, Jennifer ; Fischer, Verlyn ; Moalem, Yoel ; Saunders, Matthew

Author_Institution

Microelectron. Div., IBM Corp., Essex Junction, VT, USA

fYear

1998

fDate

23-25 Sep 1998

Firstpage

86

Lastpage

92

Abstract

Automatic defect classification tool matching requires that consistent quality images are captured on all tools. Image metrics have been developed and the variance of these metrics have been correlated to classifier matching. It is shown that in order to maintain tool matching, image color balance, focus, and shadowing must be monitored and maintained at acceptable values. Of these metrics, inappropriate color balance has the greatest effect on matching

Keywords

automatic optical inspection; fault location; focusing; image classification; image colour analysis; integrated circuit measurement; integrated circuit yield; automatic defect classification tool matching; classifier matching; consistent quality image capture; digital image metric correlation; image color balance; image focus; image metric variance; image metrics; image quality; image shadowing; inappropriate color balance; production ADC matching performance; tool matching; Apertures; Digital images; Focusing; Inspection; Lighting; Monitoring; Noise measurement; Production; Shadow mapping; Testing;

fLanguage

English

Publisher

ieee

Conference_Titel

Advanced Semiconductor Manufacturing Conference and Workshop, 1998. 1998 IEEE/SEMI

Conference_Location

Boston, MA

ISSN

1078-8743

Print_ISBN

0-7803-4380-8

Type

conf

DOI

10.1109/ASMC.1998.731407

Filename

731407