• DocumentCode
    235850
  • Title

    Library setup for epitaxial layer dopant profile using spreading resistance profiling analysis

  • Author

    Lim Saw Sing ; Lim Chan Way

  • Author_Institution
    Infineon Technol. (Kulim) Sdn Bhd, Kulim, Malaysia
  • fYear
    2014
  • fDate
    June 30 2014-July 4 2014
  • Firstpage
    98
  • Lastpage
    101
  • Abstract
    The paper describes an approach to establish library for epitaxial layer monitoring using spreading resistance profiling (SRP) technique. This library can be used as complementary technique for conventional epitaxial monitoring such as inline four-point probe (FPP) or surface charge profiler (SCP).
  • Keywords
    doping profiles; epitaxial layers; probes; surface charging; FPP; SCP; SRP technique; epitaxial layer dopant profile; epitaxial layer monitoring; inline four-point probe; library setup; spreading resistance profiling analysis; surface charge profiler; Decision support systems; Failure analysis; Integrated circuits;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Physical and Failure Analysis of Integrated Circuits (IPFA), 2014 IEEE 21st International Symposium on the
  • Conference_Location
    Marina Bay Sands
  • ISSN
    1946-1542
  • Print_ISBN
    978-1-4799-3931-2
  • Type

    conf

  • DOI
    10.1109/IPFA.2014.6898167
  • Filename
    6898167
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=235850