DocumentCode
2359085
Title
Design for control of a flexure jointed optical servo scanning platform
Author
Yeh, Yea-Chin ; Yen, Jia-Yush ; Peng, Yung-Hao ; Lee, Jhy-Fa
Author_Institution
Dept. of Mech. Eng., Nat. Taiwan Univ., Taipei, Taiwan
fYear
2005
fDate
10-12 July 2005
Firstpage
616
Lastpage
621
Abstract
High resolution and precision servo mechanism has played an important role in micro and nano optics. Its application includes projection systems, head-mount displays, scanners, cameras, heat tracking systems and so on... The servo mechanisms are often used to enhance the optical resolution by driving the scanning mirrors to reach position resolution far beyond the conventional optical systems. It is often necessary for these servo mechanisms to achieve high operation speeds while maintaining extreme positioning accuracy. To achieve this goal, this paper introduces a novel, high speed, high precision servo mechanism for an optical scanning platform. The proposed design uses piezoelectric transducers (PZT) with flexure joints. The use of the flexure joints not only eliminates backlash to achieve smooth and continuous displacement but also reduces friction to eradicate the need for lubrication. In order to understand the basic dynamics of the platform, this paper uses ANSYS for the finite element analysis (FEA) of all the desirable physical properties of the mechanism. The FEA analysis is also used for simulating the dynamic behavior of the control system. Based on the simulation results an improved controller is constructed for better scanning resolutions.
Keywords
control system synthesis; finite element analysis; optical control; piezoelectric transducers; servomechanisms; finite element analysis; flexure jointed optical servo scanning platform; optical resolution; optical scanning platform; piezoelectric transducers; scanning mirrors; servo mechanisms; Cameras; Displays; Friction; High speed optical techniques; Mirrors; Optical control; Optical design; Piezoelectric transducers; Servomechanisms; Ultraviolet sources;
fLanguage
English
Publisher
ieee
Conference_Titel
Mechatronics, 2005. ICM '05. IEEE International Conference on
Conference_Location
Taipei
Print_ISBN
0-7803-8998-0
Type
conf
DOI
10.1109/ICMECH.2005.1529330
Filename
1529330
Link To Document