DocumentCode :
2359172
Title :
Simulation of particle levitation due to dielectrophoresis
Author :
Rochus, Veronique ; Hannot, Stephan ; Golinval, Jean-Claude ; Rixen, Daniel
Author_Institution :
Dept. of Aerosp. & Mater., Univ. of Liege, Liege, Belgium
fYear :
2010
fDate :
26-28 April 2010
Firstpage :
1
Lastpage :
6
Abstract :
The aim of the research is to model accurately dielectrophoresis using different numerical tools and compare them to experimental results. The dielectrophoresis phenomenon consists in the creation of electrostatic forces on nano or micro particles due to a gradient of electric field. The aim of such a setup is to control the motion of micro or nano particles for MEMS applications, for instance, for bioanalysis devices. To validate the numerical results, some prototypes have been fabricated at TU Delft. Using these simulations, a design of microstructure has been chosen to levitate Silica micro-particles. Experimental measurements have been performed and some characteristic behaviours of particle depending on the amplitude and the frequency of the applied voltage have been identified. The measurements are compared to the numerical simulation.
Keywords :
crystal microstructure; electric field gradient; electrophoresis; nanoparticles; numerical analysis; MEMS applications; TU Delft; bioanalysis devices; dielectrophoresis; electrostatic forces; microparticles; microstructure; nanoparticles; numerical simulation; particle levitation; prototypes; Dielectrophoresis; Electrostatic levitation; Frequency measurement; Micromechanical devices; Microstructure; Motion control; Particle measurements; Performance evaluation; Prototypes; Silicon compounds;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Thermal, Mechanical & Multi-Physics Simulation, and Experiments in Microelectronics and Microsystems (EuroSimE), 2010 11th International Conference on
Conference_Location :
Bordeaux
Print_ISBN :
978-1-4244-7026-6
Type :
conf
DOI :
10.1109/ESIME.2010.5464526
Filename :
5464526
Link To Document :
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