Title :
Simulation of particle levitation due to dielectrophoresis
Author :
Rochus, Veronique ; Hannot, Stephan ; Golinval, Jean-Claude ; Rixen, Daniel
Author_Institution :
Dept. of Aerosp. & Mater., Univ. of Liege, Liege, Belgium
Abstract :
The aim of the research is to model accurately dielectrophoresis using different numerical tools and compare them to experimental results. The dielectrophoresis phenomenon consists in the creation of electrostatic forces on nano or micro particles due to a gradient of electric field. The aim of such a setup is to control the motion of micro or nano particles for MEMS applications, for instance, for bioanalysis devices. To validate the numerical results, some prototypes have been fabricated at TU Delft. Using these simulations, a design of microstructure has been chosen to levitate Silica micro-particles. Experimental measurements have been performed and some characteristic behaviours of particle depending on the amplitude and the frequency of the applied voltage have been identified. The measurements are compared to the numerical simulation.
Keywords :
crystal microstructure; electric field gradient; electrophoresis; nanoparticles; numerical analysis; MEMS applications; TU Delft; bioanalysis devices; dielectrophoresis; electrostatic forces; microparticles; microstructure; nanoparticles; numerical simulation; particle levitation; prototypes; Dielectrophoresis; Electrostatic levitation; Frequency measurement; Micromechanical devices; Microstructure; Motion control; Particle measurements; Performance evaluation; Prototypes; Silicon compounds;
Conference_Titel :
Thermal, Mechanical & Multi-Physics Simulation, and Experiments in Microelectronics and Microsystems (EuroSimE), 2010 11th International Conference on
Conference_Location :
Bordeaux
Print_ISBN :
978-1-4244-7026-6
DOI :
10.1109/ESIME.2010.5464526