Title :
Development of an optical pickup system for measuring the displacement of the micro cantilever in scanning probe microscope
Author :
Huang, Kuang-Yuh ; Hwu, En-Tc ; Chow, Hsin-Yi ; Hung, Shao-Kan
Author_Institution :
Dept. of Mech. Eng., Nat. Taiwan Univ., Taipei, Taiwan
Abstract :
This paper presents the development and the verification of a compact optical sensor system for measuring the displacement of the micro cantilever in scanning probe microscope (SPM). An optical pickup head of commercial compact disc (CD)/digital versatile disc (DVD) read only memory (ROM) drive is applied in this displacement sensor system. For fulfilling our tight measuring requirements of sensibility and reliability, the build-in detection device is replaced with a four-quadrant photodiode. The developed system is well functionally verified by measuring calibration sample of 463 nm (pitch) times 30 nm (height).
Keywords :
digital versatile discs; displacement measurement; optical sensors; photodiodes; scanning probe microscopy; 30 nm; 463 nm; build-in detection device; commercial compact disc; compact optical sensor system; digital versatile disc; four-quadrant photodiode; microcantilever displacement; optical pickup system; read only memory drive; scanning probe microscope; Calibration; DVD; Displacement measurement; Drives; Optical microscopy; Optical sensors; Photodiodes; Read only memory; Scanning probe microscopy; Sensor systems;
Conference_Titel :
Mechatronics, 2005. ICM '05. IEEE International Conference on
Conference_Location :
Taipei
Print_ISBN :
0-7803-8998-0
DOI :
10.1109/ICMECH.2005.1529345
