Development of an optical pickup system for measuring the displacement of the micro cantilever in scanning probe microscope

Author

Huang, Kuang-Yuh ; Hwu, En-Tc ; Chow, Hsin-Yi ; Hung, Shao-Kan

Author_Institution

Dept. of Mech. Eng., Nat. Taiwan Univ., Taipei, Taiwan

fYear

2005

fDate

10-12 July 2005

Firstpage

695

Lastpage

698

Abstract

This paper presents the development and the verification of a compact optical sensor system for measuring the displacement of the micro cantilever in scanning probe microscope (SPM). An optical pickup head of commercial compact disc (CD)/digital versatile disc (DVD) read only memory (ROM) drive is applied in this displacement sensor system. For fulfilling our tight measuring requirements of sensibility and reliability, the build-in detection device is replaced with a four-quadrant photodiode. The developed system is well functionally verified by measuring calibration sample of 463 nm (pitch) times 30 nm (height).

Keywords

digital versatile discs; displacement measurement; optical sensors; photodiodes; scanning probe microscopy; 30 nm; 463 nm; build-in detection device; commercial compact disc; compact optical sensor system; digital versatile disc; four-quadrant photodiode; microcantilever displacement; optical pickup system; read only memory drive; scanning probe microscope; Calibration; DVD; Displacement measurement; Drives; Optical microscopy; Optical sensors; Photodiodes; Read only memory; Scanning probe microscopy; Sensor systems;

fLanguage

English

Publisher

ieee

Conference_Titel

Mechatronics, 2005. ICM '05. IEEE International Conference on

Conference_Location

Taipei

Print_ISBN

0-7803-8998-0

Type

conf

DOI

10.1109/ICMECH.2005.1529345

Filename

1529345