DocumentCode
2359362
Title
Diamond and carbon nanorubes and their applications to MEMS and NEMS
Author
Tzeng, Y. ; Liu, Y.K.
Author_Institution
Auburn Univ., AL, USA
fYear
2005
fDate
10-12 July 2005
Firstpage
699
Lastpage
704
Abstract
Outstanding mechanical, thermal, optical, chemical, electrical, and biocompatible properties of diamond and carbon nanotubes, and their implication to and current status of practical applications to micro- and nano-electromechanical systems (MEMS/NEMS) are discussed. State-of-the-art manufacturing technologies for these materials and related processes for fabrication of high performance MEMS and NEMS are presented.
Keywords
carbon nanotubes; diamond; micromechanical devices; MEMS; NEMS; carbon nanotubes; diamond nanotubes; micro-electromechanical systems; nano-electromechanical systems; state-of-the-art manufacturing technologies; Biological materials; Biomedical optical imaging; Carbon nanotubes; Chemical technology; Diamond-like carbon; Manufacturing processes; Mechanical factors; Micromechanical devices; Nanoelectromechanical systems; Optical materials;
fLanguage
English
Publisher
ieee
Conference_Titel
Mechatronics, 2005. ICM '05. IEEE International Conference on
Conference_Location
Taipei
Print_ISBN
0-7803-8998-0
Type
conf
DOI
10.1109/ICMECH.2005.1529346
Filename
1529346
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