Fabrication of micro-lens array using dynamic mask projecting system and research electroforming technology

For centuries, the development of optics is based on the theory of geometrical optics. Most of optical components are manufactured by grinding with flat or spherical surface. With the development of new technologies, in additional to the functional requirement, the new developed products have to be smaller and compact. Under this circumstances, the development of optical components is going to be smaller and with array structure. In order to have a micro system, the micro optical components are necessary. Micro optical system becomes more and more important, especially with the demands of micro lens array. In this study, the dynamic mask technology and electroforming technology were employed to fabricate 3D micro lens array without traditional gray masks and reflow process. Proper composition of electroforming liquid and parameters can be selected to produce a high mechanical strength metal mold to achieve the goal of mass production in order to improve the technology and international competitiveness in the field of micro lens array.