Title :
Multi-ampere metal ion source
Author :
Brown, I.G. ; Galvin, J.E. ; MacGill, R.A.
Author_Institution :
Lawrence Berkeley Lab., California Univ., CA, USA
Abstract :
A new embodiment of the MEVVA (metal vapor vacuum arc) ion source has been constructed with which pulsed metal ion beams of current in the range 1-10 A can be produced. The source efficiency (ratio of beam current to arc current) has been increased and the ion beam current raised by an order of magnitude, by allowing the plasma to expand to a large diameter and forming the beam with a set of large-area extractor grids. Preliminary test results are presented. In a simplified configuration, the source can provide a beam at over 90 kV and with a pulsed beam current of 2 A
Keywords :
ion sources; particle beam diagnostics; 1 to 10 A; 90 kV; MEVVA; ion beam current; metal ion source; metal vapor vacuum arc; multiampere; pulsed beam current; pulsed metal ion beams; source efficiency; Current measurement; Ion beams; Ion sources; Magnetic field measurement; Particle beams; Plasma density; Plasma immersion ion implantation; Plasma measurements; Plasma sources; Vacuum arcs;
Conference_Titel :
Particle Accelerator Conference, 1989. Accelerator Science and Technology., Proceedings of the 1989 IEEE
Conference_Location :
Chicago, IL
DOI :
10.1109/PAC.1989.73149
