Title :
Effects of the geometrical dimensions on stress and strain of electrostatically actuated MEMS resonators at pull-in and stiction positions
Author :
Pustan, M. ; Rochus, V. ; Golinval, J.-C.
Author_Institution :
Dept. of Aerosp. & Mech. Eng., Univ. of Liege, Liege, Belgium
Abstract :
The aims of this study are to estimate the effect of geometrical dimensions on stiffness, stress and strain of flexible MEMS structures at pull-in and stiction positions. Microcantilevers and microbridges are often used as flexible mechanical elements in microsystems for sensing and actuation functions. Analytical models for stiffness, stress and strain of flexible microcomponents as microcantilevers are developed and presented in this paper. Experimental investigations are performed on samples fabricated from gold with different geometrical dimensions using Atomic Force Microscope. The distribution of stress in deformable MEMS components is changed as function of the contact areas between the flexible plate and substrate.
Keywords :
cantilevers; elasticity; flexible electronics; flexible structures; micromechanical devices; stress analysis; atomic force microscope; electrostatically actuated MEMS resonators; flexible MEMS structures; geometrical dimensions; microbridges; microcantilevers; pull-in position; stiction position; stiffness; strain; stress; Aerospace engineering; Atomic force microscopy; Capacitive sensors; Deformable models; Electrostatics; Iron; Micromechanical devices; Shearing; Stress; Thermal force;
Conference_Titel :
Thermal, Mechanical & Multi-Physics Simulation, and Experiments in Microelectronics and Microsystems (EuroSimE), 2010 11th International Conference on
Conference_Location :
Bordeaux
Print_ISBN :
978-1-4244-7026-6
DOI :
10.1109/ESIME.2010.5464576
