Title :
Ultra-thin chips and related applications, a new paradigm in silicon technology
Author :
Burghartz, Joachim N. ; Appel, Wolfgang ; Harendt, Christine ; Rempp, Horst ; Richter, Harald ; Zimmermann, Martin
Author_Institution :
Inst. fur Mikroelektron. Stuttgart (IMS CHIPS), Stuttgart, Germany
Abstract :
Ultra-thin chip technology has potential to provide solutions for overcoming bottlenecks in silicon technology and for leading to new applications. This, however, requires new techniques in fabricating very thin wafers or chips, in applying them to device integration processes and in assembly and packaging. Therefore, ultra-thin chips and the related applications represent a new paradigm in silicon technology. The paper highlights the prominent applications of ultra-thin chips, alerts to the related technological issues and compares the candidate enabling technologies.
Keywords :
elemental semiconductors; microassembling; semiconductor device packaging; semiconductor devices; semiconductor thin films; silicon; Si; silicon technology; thin wafers; ultrathin chips; Assembly; Endoscopes; Implants; Mechanical factors; Microelectronics; Packaging; Paper technology; Power dissipation; Security; Silicon;
Conference_Titel :
Solid State Device Research Conference, 2009. ESSDERC '09. Proceedings of the European
Conference_Location :
Athens
Print_ISBN :
978-1-4244-4351-2
Electronic_ISBN :
1930-8876
DOI :
10.1109/ESSDERC.2009.5331441