DocumentCode
2361232
Title
Manufacturing for design: putting process control in the language of the designer
Author
Potts, David C.
Author_Institution
Fairchild Semicond., South Portland, ME, USA
fYear
1998
fDate
23-25 Sep 1998
Firstpage
187
Lastpage
189
Abstract
A methodology is presented for evaluation of process control from the designer´s perspective, that of overall electrical performance. Technology tables and a comprehensive set of strategically chosen wafer electrical tests are used to capture and maintain the electrical signature of a process
Keywords
design for manufacture; integrated circuit design; integrated circuit manufacture; integrated circuit testing; process control; designer perspective; manufacturing for design; overall electrical performance; process control; process electrical signature; strategically chosen wafer electrical tests; technology tables; Condition monitoring; Control charts; Data analysis; Manufacturing processes; Process control; Process design; Production; Semiconductor device manufacture; Semiconductor device modeling; Testing;
fLanguage
English
Publisher
ieee
Conference_Titel
Advanced Semiconductor Manufacturing Conference and Workshop, 1998. 1998 IEEE/SEMI
Conference_Location
Boston, MA
ISSN
1078-8743
Print_ISBN
0-7803-4380-8
Type
conf
DOI
10.1109/ASMC.1998.731551
Filename
731551
Link To Document