Title :
Nearfield scanning microwave microscopes
Author_Institution :
Fed. Inst. of Metrol. METAS, Bern-Wabern, Switzerland
Abstract :
This paper presents an overview of the applications of near field scanning microwave microscopes. The difficulties and approaches to obtain calibrated and traceable measurements with a scanning microwave microscope are discussed.
Keywords :
calibration; microwave devices; near-field scanning optical microscopy; optical microscopes; calibration; near field scanning microwave microscope; Battery charge measurement; Dielectric measurement; Microscopy; Microwave imaging; Microwave measurement; Microwave theory and techniques; Semiconductor device measurement; S-parameters; circuit theory; near field scanning microwave microscope (NSMM); pertubation theory; traceability;
Conference_Titel :
Precision Electromagnetic Measurements (CPEM 2014), 2014 Conference on
Conference_Location :
Rio de Janeiro
Print_ISBN :
978-1-4799-5205-2
DOI :
10.1109/CPEM.2014.6898337
