Title :
Electrical transport at the nanoscale: Scanning Spreading Resistance, Scanning Capacitance and Scanning Kelvin Probe
Author :
Cuenat, A. ; Muniz-Piniella, Andres
Author_Institution :
Functional Group, Nat. Phys. Lab., Teddington, UK
Abstract :
This a outline of a review of metrological issues related to nanoscale electrical transport measurement presented at CPEM-2014. A brief overview of the instrumentation used to measure electrical transport properties at the nanoscale is presented and a few metrological issues are discussed.
Keywords :
capacitance measurement; electric resistance measurement; CPEM-2014; instrumentation; nanoscale electrical transport measurement; scanning Kelvin probe; scanning capacitance; scanning spreading resistance; Current measurement; Electrical resistance measurement; Materials; Nanoscale devices; Pollution measurement; Resistance; Semiconductor device measurement;
Conference_Titel :
Precision Electromagnetic Measurements (CPEM 2014), 2014 Conference on
Conference_Location :
Rio de Janeiro
Print_ISBN :
978-1-4799-5205-2
DOI :
10.1109/CPEM.2014.6898338
