Title :
A novel Love mode SAW sensor with ZnO layer operating in gas and liquid media
Author :
Kalantar-zadeh, Kourosh ; Chen, Yuen Yuen ; Fry, Benjamin N. ; Trinchi, Adrian ; Wlodarski, Wojtek
Author_Institution :
Sch. of Electr. & Comput. Eng, R. Melbourne Inst. of Technol., Vic., Australia
Abstract :
Novel layered Surface Acoustic Wave (SAW) sensors, based on a ZnO/90° rotated ST-cut quartz crystal structure, were fabricated. They were employed as gravimetric sensor´s for immunosensing applications and as SAW conductometric sensors for gas sensing applications. These sensors are able to sense oxygen gas concentrations as low as 0.2 ppm in nitrogen gas. Their mass detection limit in liquid media is as low as 100 pgr/cm2
Keywords :
Love waves; biosensors; chemical sensors; gas sensors; surface acoustic wave sensors; zinc compounds; Love mode SAW sensor; N2; O2; ZnO layer; ZnO-SiO2; conductometric sensor; gas sensor; gravimetric sensor; immunosensor; liquid sensor; mass detection; quartz crystal; Acoustic sensors; Acoustic waves; Chemical sensors; Frequency; Gas detectors; Sensor phenomena and characterization; Substrates; Surface acoustic wave devices; Surface acoustic waves; Zinc oxide;
Conference_Titel :
Ultrasonics Symposium, 2001 IEEE
Conference_Location :
Atlanta, GA
Print_ISBN :
0-7803-7177-1
DOI :
10.1109/ULTSYM.2001.991640
