Title :
Acoustic HBAR spectroscopy of metal (W, Ti, Mo, Al) thin films
Author :
Mansfeld, G.D. ; Alekseev, S.G. ; Kotelyansky, I.M.
Author_Institution :
Inst. of Radio Eng. & Electron., Acad. of Sci., Moscow, Russia
Abstract :
The method of HBAR spectroscopy of thin films was modified and applied for acoustic characterization of W, Ti, Mo, and Al films. The results of the measurements of attenuation coefficient and sound velocity in these materials are presented
Keywords :
acoustic wave absorption; acoustic wave velocity; metallic thin films; Al; Mo; Ti; W; acoustic HBAR spectroscopy; attenuation coefficient; high overtone bulk acoustic wave spectroscopy; metal thin film; sound velocity; Acoustic materials; Acoustic waves; Attenuation measurement; Electrodes; Loss measurement; Piezoelectric films; Resonant frequency; Spectroscopy; Substrates; Transistors;
Conference_Titel :
Ultrasonics Symposium, 2001 IEEE
Conference_Location :
Atlanta, GA
Print_ISBN :
0-7803-7177-1
DOI :
10.1109/ULTSYM.2001.991652
