Title :
200mm manufacturing solution for Coupled Resonator Filters
Author :
Billard, C. ; Buffet, N. ; Reinhardt, A. ; Parat, G. ; Joblot, S. ; Bar, P.
Author_Institution :
CEA, MINATEC, Grenoble, France
Abstract :
Coupled resonator filters (CRF) are an evolution of bulk acoustic wave (BAW) filters which overcome the limitations of BAW and SAW filters and may become in the next few years the leading technology for RF filters. This paper presents for the first time a 200 mm process for CRF utilizing equipments and infrastructures of a standard IC fab. Key process improvements to reach an attractive device yield on wafer, in particularly the trimming process, are described.
Keywords :
bulk acoustic wave devices; integrated circuit manufacture; radiofrequency filters; resonator filters; surface acoustic wave filters; BAW filters; CRF utilizing equipments; RF filters; SAW filters; bulk acoustic wave filters; coupled resonator filters; manufacturing solution; standard IC fab; Acoustic waves; Electrodes; Manufacturing; Microwave filters; Mirrors; Multiaccess communication; Radio frequency; Resonator filters; SAW filters; Surface acoustic waves;
Conference_Titel :
Solid State Device Research Conference, 2009. ESSDERC '09. Proceedings of the European
Conference_Location :
Athens
Print_ISBN :
978-1-4244-4351-2
Electronic_ISBN :
1930-8876
DOI :
10.1109/ESSDERC.2009.5331553
