DocumentCode
2362408
Title
200mm manufacturing solution for Coupled Resonator Filters
Author
Billard, C. ; Buffet, N. ; Reinhardt, A. ; Parat, G. ; Joblot, S. ; Bar, P.
Author_Institution
CEA, MINATEC, Grenoble, France
fYear
2009
fDate
14-18 Sept. 2009
Firstpage
133
Lastpage
136
Abstract
Coupled resonator filters (CRF) are an evolution of bulk acoustic wave (BAW) filters which overcome the limitations of BAW and SAW filters and may become in the next few years the leading technology for RF filters. This paper presents for the first time a 200 mm process for CRF utilizing equipments and infrastructures of a standard IC fab. Key process improvements to reach an attractive device yield on wafer, in particularly the trimming process, are described.
Keywords
bulk acoustic wave devices; integrated circuit manufacture; radiofrequency filters; resonator filters; surface acoustic wave filters; BAW filters; CRF utilizing equipments; RF filters; SAW filters; bulk acoustic wave filters; coupled resonator filters; manufacturing solution; standard IC fab; Acoustic waves; Electrodes; Manufacturing; Microwave filters; Mirrors; Multiaccess communication; Radio frequency; Resonator filters; SAW filters; Surface acoustic waves;
fLanguage
English
Publisher
ieee
Conference_Titel
Solid State Device Research Conference, 2009. ESSDERC '09. Proceedings of the European
Conference_Location
Athens
ISSN
1930-8876
Print_ISBN
978-1-4244-4351-2
Electronic_ISBN
1930-8876
Type
conf
DOI
10.1109/ESSDERC.2009.5331553
Filename
5331553
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