RF-MEMS dielectric charging: Dependence on dielectric film polarization procedures

Author

Papaioannou, George ; Papapolymerou, John ; Pons, Patrick ; Plana, Robert

Author_Institution

Georgia Inst. of Technol., Atlanta

fYear

2007

fDate

26-28 Sept. 2007

Firstpage

1

Lastpage

6

Abstract

The paper demonstrates the advantages arising from the simultaneous assessment of RF-MEMS capacitive switches and MIM capacitors. The application of simple capacitive-voltage characteristics and thermally stimulated depolarization current methods, respectively, allow the discrimination of the contribution of injected charges induced space charge polarization and the dipolar polarization. The proposed method allows the direct determination of device degradation sources and can be used for the dielectric material improvement.

Keywords

MIM devices; capacitors; dielectric polarisation; micromechanical devices; space charge; MIM capacitors; RF-MEMS; capacitive switches; depolarization current method; dielectric charging; dielectric film polarization; dielectric material improvement; dipolar polarization; space charge polarization; Dielectric devices; Dielectric films; Dielectric materials; Lattices; MIM capacitors; Micromechanical devices; Polarization; Radiofrequency microelectromechanical systems; Space charge; Switches; Dielectrics polarization; microelectromechanical devices; reliability; surface charging;

fLanguage

English

Publisher

ieee

Conference_Titel

AFRICON 2007

Conference_Location

Windhoek

Print_ISBN

978-1-4244-0987-7

Electronic_ISBN

978-1-4244-0987-7

Type

conf

DOI

10.1109/AFRCON.2007.4401447

Filename

4401447