Identification of a Three Phase Panel Type Electrostatic Actuator

This paper describes dynamic characteristics, modeling and system identification of a panel type electrostatic actuator which is used for transportation particles. The actuator is composed of parallel electrodes encased in epoxy resin, an insulating thin cover-film, a supporting panel and electrode-attachment to the three-phase high voltage signals. Using a digital storage oscilloscope, this study explores the dynamic characteristic and model of the actuator using system identification analysis. The frequency response data at a discrete set of frequencies obtained from the electrodes are analyzed using the prediction error minimization method (PEM) system identification to reveal important dynamic characteristics including frequency response and transfer function. It is shown that in addition to capacitance effect, the actuator has inductor effect. Based on the proposed model, the effect of signal profile (sine, square and sawtooth) on current consumption and induction current between electrodes is analyzed.