Title :
“Green” process and productivity improvements in a GaAs light emitting diode wafer fab
Author :
Evans, Keenan ; Alcorn, Terry ; Hadizad, Peyman ; Edwards, Keith ; Fischer, Roland ; Nielsen, Donna ; Richie, Frank ; Saha, Naresh
Author_Institution :
CPSTG, Motorola Inc., Phoenix, AZ, USA
Abstract :
A self directed process improvement team was initiated to streamline the GaAs light emitting diode (LED) wafer process flow and enhance product yields. “Green” benefits of this study to improve GaAs LED wafer processing yields included the elimination of a significant number of chemical processing steps. The new process is more environmentally “friendly” through the use of fewer and “milder” chemicals. Thus wafer production is enhanced with both a yield increase and a cost decrease due to lower levels of chemical usage
Keywords :
III-V semiconductors; circuit optimisation; economics; environmental factors; gallium arsenide; human resource management; integrated circuit yield; light emitting diodes; semiconductor device manufacture; GaAs; chemical usage levels; cost decrease; environmentally friendly process; light emitting diode; process flow; product yields; productivity improvements; self directed process improvement team; wafer fab; Chemical processes; Electrons; Etching; Gallium arsenide; Light emitting diodes; Oxidation; Productivity; Surface cleaning; Surface contamination; Zinc;
Conference_Titel :
Electronics and the Environment, 1995. ISEE., Proceedings of the 1995 IEEE International Symposium on
Conference_Location :
Orlando, FL
Print_ISBN :
0-7803-2137-5
DOI :
10.1109/ISEE.1995.514985
